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Publications and Presentation of Scientific Accomplishment :

Members of the Institute were very productive over the past four years. The following is a list of recent publications for the period of 2000-2004. Publications are categorized as Book Contribution, Journal Papers and Conference Papers. Please note the Joint work resulted between faculty members of the institute.

Book Contributions:

  • “Applications of MicroElectroMechanical Systems”, M.E.Zaghloul and D. Nagel, Chapter, The Electrical Engineering Handbook, Wai-Kai Chen, Editor, Academic Press, 2004.
  • “MEMS Designs and Applications, an Introduction”, M.E.Zaghloul, Chapter, Mechanical Engineering Handbook, Wiley publishing, Myer Kutz Editor, to appear 2005.

Journal and Archival Publications:

  • V. Milanovic, E. Bowen, M. Zaghloul, N. Tea, J. Suehle, and M. Gaitan, "Micro machined Convecture Accelerometers in Standard Integrated Circuits Technology,” Journal of Applied Physics Letters, Vol 76(4), Jan. 2000, pp. 508 518.
  • M. Ozgur, M. E. Zaghloul, and M. Gaitan, “Micro machined 28 GHZ Wilkinson divider in CMOS technology”, IEEE Microwave and guided letter, pp. 99-101, March 2000.
  • M. Ozgur, V. Milanovic, C. Zincke, M. Gaitan, and M. E. Zaghloul, "Quasi TEM Characteristic Impedance of Micro machined CMOS Coplanar Wave Guides," IEEE Transactions on Microwave Theory Techniques, 48(5), May 2000, pp 852-853.
  • Rasmussen, M. E. Zaghloul, C. Mavriplis, O. Mikulchenko, and K. Mayaram, "Simulation and Optimization of Microfluidic Flow Sensor," the Journal of Sensors and ActuatorsA, Elsivier Sciences S. A, Vol.88, Issue2, pp 121-132, February 2001.
  • Rasmussen, L. Locascio, M. Gaitan, and M. E. Zaghloul, "Fabrication Techniques to Realize MOS Compatible Microfluidic Microchannels,"the Journal of Microelectromechanical Systems, IEEE/ASME, vol.10, June 2001.
  • D.Nagel, and M.E.Zaghloul, “MEMS: MicroTechnology, Mega Impact,” IEEE Circuits and Devices Magazine, 17(2), March 2001 (It is Cover page Article).
  • M. Ozgur, and M.E. Zaghloul,” MEMS Components for RF communication using CMOS technology”, International Journal of RF and Microwave Computer –Aided Engineering, Special Issue on RF Applications of MEMS and Micromachining, Vol. 11, No. 5, PP 330-340, Ocober2001.
  • S. Ahmadi, and M. E. Zaghloul, “A fabry- Perot Optical Sensor System on Chip”, Canadian Journal of Electrical and Computer Engineering, CJCEC Vol. 26, No. 3, Dec. 2001.
  • M. Afridi, J.S. Suehle, M.E.Zaghloul, D.W. Berning, A.R.Hefner, R.E.Cavicchi, S.Semacik, C.B. Montgomery, C. J. Taylor, “ A Monolithic CMOS Micro hotplate-Based Gas Sensor System”, IEEE SENSORS Journal, Vol. 2, No.6, December 2002, PP644-655.
  • B.Xu, K.T. Ooi, C. Mavriplis, and M.E.Zaghloul, “Evaluation of Viscous Dissipation in Liquid Flow in Microchannels”, Journal of Micromechanics and Microengineering, 13, January 2003, pp 53-57.
  • P. Thaker, V. Agrawal, M. E. Zaghloul, “A Test Evaluation Technique for VLSI Circuits Using Register-Transfer Level Fault Modeling”, the IEEE transaction CAD for VLSI, Volume 22, Number 8, August 2003, pp1104-1113.
  • N. Guillaume, M. Lahti, M. Cresswell, R. Allen, L. Linholm, and M. E. Zaghloul “Non-Contact Critical Dimension Metrology Sensor for Chrome Photomasks Featuring a Low Temperature Co-Fired Ceramic Technology”, the IEEE Transactions on Semiconductor Manufacturing, February 2004
  • N. Guillaume, W. Khan, R. Allen, M. Cresswell, and M. E. Zaghloul, “Extension of the Application of Conformal Mapping Techniques to Parallel Conductors of Finite Dimensions”, the IEEE Transactions on Instrumentations and Measurements, June 2004.
  • I. Voiculoescu, M.E.Zaghloul, A. McGill, G. Fedder, “ Electrically Actuated Resonant Micro cantilever in CMOS Technology for Detection of Chemical Weapons” the IEEE Sensors Journal, Special Issue on Sensors for prevention of Terrorist Acts, Vol. 5,No. 4, August 2005, pp 641-647. (BEST PAPER AWARD IEEE Sensors Journal 2007 )
  • Yarimbiyik A.E., Schafft H.A., Allen R.A., Zaghloul M.E., Blackburn D.L., “Modeling and Simulation of Resistivity of Nanometer Scale Copper”, Device and materials Reliability,, Volume 46, Issue 7, July 2006,pp1050-157.
  • A.Zaki, H.Elsimary,M.Zaghloul, “ Miniature SAW Device for RF Wireless Applications Using MEMS Technology”,WSEAS Transaction on Electronics, Issue 7, Volume 3, pp399, July 2006, ISSN 1109-9445, http://www.wseas.org
  • Voiculescu, I.; Mcgill, R.A.; Zaghloul, M.E.; Mott, D.; Stepnowski, J.; Stepnowski, S.; Summers, H.; Nguyen, V.; Ross, S.; Walsh, K.; Martin,”Micropreconcentrator for Enhanced Trace Detection of Explosives and Chemical Agents”, IEEE Sensors Journal, Volume 6, Issue 5, October 2006, pp 1094- 1104.
  • I. Voiculoescu, M.E.Zaghloul, A. McGill, “ Modeling and Measurements of a composite Micro cantilever Beam for Chemical Sensing Applications”, the Proceedings of the Institution of Mechanical Engineers, Part C, Journal of Mechanical Engineering Science, Volume 220, Number 10/2006, PP1601-1608.
  • O.Tigli, M.E.Zaghloul, “A Novel SAW Sensor in CMOS: Design, Modeling, and fabrication”, IEEE Sensors Journal, Vol. 7, No.2, February 2007, pp219-227.
  • A. Nordin, M.E.Zaghloul, “Modeling and fabrication of CMOS Surface acoustic Resonators”, IEEE Transaction of Microwave Theory and Techniques, Volume55, Number 5, May 2007, pp992-1001.
  • I. Voiculoescu, M.E.Zaghloul, Narachichikin,” Trends for Micro fabricated Preconcentrator for Analytical Sensing Systems: review” Accepted to Trends in Analytical Chemistry, Elsevier.

Conference Proceedings:

  • I.Voiculescu, M.E.Zaghloul, A. McGill, “Design and Modeling of Microbeam Gas Sensor in CMOS Technology”, Symposium AJ1, 201st meeting of the Electrochemical Society, Philadelphia, Inc., PA, May 12-17, 2002.
  • I. Voiculescu, M.E.Zaghloul,R.Anrew McGill, “ Design and Modeling of Microbeam Gas Sensor in CMOS Technology”, A solid – State, Actuator and Microsystems Workshop, Hilton Head 2002.
  • M.Y.Afridi, J.S. Suehle, M.E.Zaghloul, D.W.Berning, A. Hefner, S. Semancik, R.E. Cavicchi, “ A Monolithic Implementation of Interface Circuitry for CMOS Compatible Gas- Sensor System”, the proceeding of IEEE International Conference On Circuits and Systems, Arizona, May 2002.
  • A. Hudge, R. Newcomb, M. E. Zaghloul, O. Tigli, “System On Chip Architecture for MultiTechnology”, the proceeding IEEE International Conference on Circuits and Systems, Arizona, May 2002.
  • H. Hamed, M.E.Zaghloul, and A.E. Salama, “A Self Synchronizing Digital FSK Demodulator for Applications with Transmission Rate Comparable to the Carrier Frequencies”, Proceedings of the 11th IEEE Mediterranean Electro technical Conference, May 2002.
  • M. Riegelman, Y. Chen, J.Li, M.E.Zaghloul, “Computer Simulations and Design Optimizations of Piezoelectric Resonator”, 14th U.S. National Congress of Theoretical and Applied Mechanics, Virginia Tech, Blacksburg, VA, June24-28, 2002.
  • M.E.Zaghloul, “ MEMS, Microsystems and Nan systems”, Proceedings of the 7th International Workshop on Cellular Neural Networks and their Applications, Editor Ronald Tetzlaff, World Scientific, July 2002, pp.512-514.
  • A. Nurashikin, M.E.Zaghloul, “ CMOS Implementation of Sigma-Delta Analog to Digital Data Converter Suitable for MEMS Devices’, Proceedings of the IEEE Midwest Symposium on Circuits and Systems, Dayton Ohio, August 2002.
  • I. Voiculescu, M. Zaghloul, A. McGill, “ Cantilever Gas Sensor”, The Proceedings of the IEEE International Symposium on Circuits and Systems, Bangkok, Thailand, May 25-28, 2003.
  • S. Ahmadi, C.Korman, M.E.Zaghloul, “CMOS Implementation of Surface Acoustic Wave device for Gas Sensor”, The Proceedings of the IEEE International Symposium on Circuits and Systems, Bangkok, Thailand, May 25-28, 2003.
  • A.Zaghloul, O. Killic, M.E.Zaghloul, “MEMS- Based Modular Phased Array for Low Earth Orbiting Satellite Terminals”, the IEEE Phased Array Systems and Technology Symposium, October 2003.
  • S. Ahamadi, C. Korman, M.E.Zaghloul, “ ZnO based CMOS Surface Acoustic Wave gas Sensor”, the proceedings of the IEEE Sensors Conference , Toronto, Canada, October 2003.
  • I. Voiculescu, M. Zaghloul, R A. McGill, “ Design and Fabrication of Temperature Sensor Based on Thermopile in CMOS Technology, Proceeding of IMECE2003, ASME International Mechanical Engineering Congress& Exposition, November 15-21, pp 597-601, 2003, Washington DC.
  • F. Hassani, S. Ahmadi, C. Korman, M. Zaghloul, H. Shiva, R. Vispute, T. Venkatesan, “ ZnO Based Delay Line Sensor, Fabrication and Characteristics”, MRS , December 1-5, 2003, Boston, MA.
  • F. Hassani, S. Ahmadi, C. Korman, M.Zaghloul, “ ZnO Based SAW Delay Line Sensor Fabrication and Characterization” IEEE Midwest Symposium on Circuits and Systems, December 27-29, 2003, Cairo Egypt.
  • A. Noiurdin, M.Zaghloul, S. Ahmadi, C. Korman, “Design and implmentation of CMOS Surface Acoustic Wave Resonators” IEEE Midwest Symposium on Circuits and Systems, December 2003, Cairo, Egypt.
  • H.Hamed,A.Salama, M.E.Zaghloul, “ A Novel Technique To Generate Fine Resolution Hysteresis in Decision Circuits”, IEEE Midwest Symposium on Circuits and Systems, December 2003, Cairo, Egypt
  • I. Voiculescu, M. Zaghloul, R A. McGill, “Electrostatic Actuated Resonant Micro cantilever in CMOS technology for Gas Sensor Application”, presented at the MEMS- Alliances of Washington DC on MEMS in Homeland Security, March 2004.
  • I. Voiculescu, M. Zaghloul, R A. McGill, “Resonant Microcantilever Gas Sensor fabrication in CMOS technology for Gas Sensors”, Presented at Hilton Head Workshop, June 2004.
  • S. Arnold, S.M.Prokes, Mona E.Zaghloul, “Localized Growth of Silicon Nanowire for enhanced Sensitivity of a Micro-Resonant Vapor Detection System”, presented at the Nanotechnology Alliance, Washington DC, September 2004.
  • S. Ahmadi, F. Hassani, C. Korman, M. Rahman, and M. Zaghloul, “ Characterization of Multi and Single layer Structure SAW Sensor”, IEEE Proceedings of IEEE-Sensors 2004, Vienna, October 2004.
  • S. Ahmadi, F.Hassani, C.Korman, M.Rahman, O. Tigli, and M.Zaghloul, “Multi and Single layer Structure Network adaptable and CMOS Compatible SAW Sensor: Characterization and Simulation”, presented at the MEMS Alliance, Washington DC, April 2005.
  • A. Nordin, F. Hassani, M.Rahman, M.Zaghloul, S.Ahmadi, “Design and Characterization of CMOS Surface Acoustic Wave Resonator: with telecommunication and sensor application”, presented at the MEMS Alliance, Washington DC, April 2005.
  • T. Farmer, M.E.Zaghloul,” CMOS Digital Control Circuit for MEMS Switch based Phased Array Antenna”, IEEE Antenna and Propagation Society International Symposium, Vol. 1A, pp 516-519, Washington DC, July 2005.
  • A. Nordin, M.E.Zaghloul, “ CMOS Surface Acoustic Wave Oscillator”, the proceedings of the IEEE Midwest Symposium on Circuits and Systems, August, 2005.
  • S. Arnold, M.E.Zaghloul, “Localized Growth and Functionalization of Silicon Nanowires for MEMS Sensors Applications”, Proceedings of the European Conference on CircuitsTheory and Design, ECCTD, Kork, Ireland, August 29-Sept.2nd, 2005.
  • O.Tigli, M.E.Zaghloul, “Design and fabrication of Novel SAW gas Sensor in CMOS Technology”, Invited for special session on CMOS sensors, IEEE Sensors conference, Irvine CA, October 2005.
  • A. Nordin, M.E.Zaghloul,” Design and Implementation of 1GHz CMOS resonator utilizing Surface Acoustic Wave”, to appear in the Proceedings of the IEEE International Symposium on Circuits and Systems ISCAS06.Island of Kos, Greece, 2006.
  • Chun-Li Wu, M.E.Zaghloul, “CMOS Mixer Design with Micromachined Input Matching Circuits for Wireless Applications”, Proceedings of the IEEE International Symposium on Circuits and Systems ISCAS06.Island of Kos, Greece, 2006.
  • Amal Zaki, Hamed Elsimary, and Mona Zaghloul, Miniature SAW Device for RF Applications using MEMS Technology”, Proceedings of the IEEE Midwest Symposium on Circuits and Systems, Puerto- Rico, August 2006
  • M.Taghioskoui, K. Jorabchi, M.Zaghloul, A. Montaser,” Micro Plasma Chips for Chemical Analysis”, Federation of Analytical Chemistry & Spectroscopy Societies, National Meeting FACSS 2006, September 2006, Pp 149
  • C. A. Nwokoye, M.Zaghloul, M.W. Cresswell, R.A. Allen, C.E. Murabito, “A new critical dimension metrology for chrome on glass substrates based on s-parameter measurements extracted from coplanar waveguide test structures”, Proceedings of the SPIE Photo mask Technology , September 2006., Volume 6349.
  • S. Zhang, M.E.Zaghloul, “On the Topology of CMOS VCO toward Wideband Multi –Standard Applications”, IEEE Wireless and Microwave Technology Conference, Clear water Florida, December 2006.
  • S.Zhang, M.E.Zaghloul, “ low noise Wideband CMOS voltage Controlled Oscillator using MEMS switch Technology”, Wireless and Microwave Technology Conference, 2006, WAMICON’06, Dec2006, pp1-5
  • S. Zhang, M.E.Zaghloul, s. Wansheng, R.Elkis, C. Wu, “ Comparison of VCO Topology for Wideband Multi Standard Applications”, Wireless and Microwave Technology Conference, 2006, WAMICON’06, Dec2006, pp1-4
  • A. Zaki, H.C.Ou, M.E.Zaghloul, H. Elsimary, “ Implementation of MEMS-SAW device on RF Circuits for Wireless Applications”, Proceedings of the IEEE Midwest Symposium on Circuits and Systems, Montreal, Canada, August 2-5 2007.
  • Shumin Zhang, Wansheng Su, Mona E. Zaghloul, „ Low Noise Multiband Voltage Controlled Oscillator Using MEMS Technology“, Proceedings of the IEEE Midwest Symposium on Circuits and Systems, Montreal, Canada, August 2-5 2007.
  • O.Tigli, M.E.Zaghloul, “Novel Circular SAW Sensor in CMOS”, Nanoelectronic Devices for Defense & Security (NANO-DDS) Conference, June2007. Conference sponsored by US Army, and DARPA.
  • O. Tigli, M.E.Zaghloul, “Modeling of Novel Circular SAW (Surface Acoustic Wave) in CMOS”, in the Proceedings of the IEEE Sensors Conference, Atlanta Georgia, October 28-31, 2007.
  • .S. Zhang, W. Su, M.E Zaghloul, “ CMOS Compatible Edge Coupled Capacitive MEMS Switch for RF Applications”, IEEE International Conference on Microelectronics (ICM) 2007, 29-31 December 2007, Cairo, Egypt, ICM@vlsi.uwaterloo.ca
  • A.N.Nordin, M.Zaghloul, and I. Voiculescu, “ On Chip Hotplate for Temperature Control of CMOS SAW resonators”, Symposium on Design, Test, Integration, and Packaging of MEMS/MOEMS, DTIP, 9-11 April 2008, Nice, French Riviera, France
  • F. Mohd-Yasin, D.J. Nagel, D.S. Ong, C.E. Korman, and H.T. Chuaha, "Low Frequency Noise Measurement and Analysis of Capacitive Micro-Accelerometers," 32nd International Conference on Micro- and Nano-Engineering, Barcelona, Spain, September, 2006.
  • F. V. Gasparyan , C. E. Korman and S. V. Melkonyana, "Noises of p-i-n UV Photodetectors," SPIE Fluctuations and Noise Conference, May 20-24, 2007, Florence, Italy.
  • B. A. Noaman, C. E. Korman and A. J. Piazza, "A Semiconductor Device Noise Model: Integration of Poisson Type Stochastic Ohmic Contact Conditions with Semiclassical Transport" SPIE Fluctuations and Noise Conference, May 20-24, 2007, Florence, Italy.
  • E. Della Torre, C. Korman and L. H. Bennett, "Comparison of thermal aftereffect models for estimating the fluctuation field," 6th International Symposium on Hysteresis Modeling and Micromagnetics HMM-2007, Naples, Italy 4-6 June, 2007.
  • F.V. Gasparyan, S.V. Melkonyan, H.V. Asriyan, C.E. Korman, B. Noaman, V.A. Gevorgyan, A.H. Arakelyan, A.A. Shatvetyan, and A. M. Avetisyan, "Short Outline Of Silicon Mos-Like Structures Fabrication Techniques, Cvc And Noise Measurements," 6th International Conference on "Semiconductor Micro- and Nano-Electronics" (ICSMN-07), Yerevan, Armenia.
  • F. Mohd-Yasina, D.J. Nagel, D.S. Ong, C.E. Korman, and H.T. Chuah, "Low Frequency Noise Measurement of Three-Axis Surface Micro-Machined Silicon Capacitive AccelerometerCapacitive Accelerometer," 33rd International Conference on Micro- and Nano-Engineering, September 2007, Copenhagen, Denmark.

Seminars and Invited Talks:

  • M.E.Zaghloul, Member of the IEEE-CAS Distinguished Lecturer in the IEEE Distinguished Lecture Program, 2000-2002.
  • Key note Speaker at the University of Waterloo Graduation Ceremony and Celebration of the 50th year, June 16 2007.
  • Presented talk at NSF workshop Tunis Titled “ Micro Cantilever Gas Sensors “, December 2006
  • Invited to Plenary Lecture to the 2nd International Meeting on Micro sensors and Microsystems, National Cheng Kung University, Tainan, Taiwan, January 15-16,2006
    4. Invited to the Institute for Computing, Information and Cognitive Systems ICICS, University of British Columbia, Vancouver, BC, Canada, Distinguished Lecture Series Spring 2003, “MicroElectroMechanical Systems Technology” , March 27, 2003.
  • Member of the IEEE-CAS Distinguished Lecturer in the IEEE Distinguished Lecture Program, 2000-2002.
  • M.E. Zaghloul, “ Overview of MEMS Technology with applications to RF Communication “’ presented as IEE-CAS DLP, for Southeastern Michigan Section, Chapter I, March 27, 2002
  • . M.E. Zaghloul, “CMOS Implementation of Gas Sensors and their Circuits Interfaces”, Presented to the Department of Electrical and Computer Engineering, Oakland University, MI, March 2002.
  • M.E.Zaghloul, “ Overview o MEMS Technology with applications to RF Communication”, Presented to the Department of Electrical and Computer Engineering, Virginia Tech, VA, April 2002.
  • M.E.Zaghloul, “ MEMS, Microsystems and Nanosystems”, Plenary Keynote Speaker at the 7th International Workshop on Cellular Neural Networks and their Applications, Frankfurt, Germany, July 2002.
  • Presented Plenary talk at the IEEE MIDWEST Symposium on Circuits and Systems, Dayton, Ohio, August 2001.
  • Presented Plenary Talk at the 2nd Inetrnational Meeting on Microsensors and Microsystems, National Cheng Kung University, Tainan, Taiwan, January 15-18, 2006.
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